Offering over 100 specialty gases and mixtures, we are the first and global choice for electronic special gases. Our extensive process knowledge ensures that our electronic gases exceed your most stringent purity and consistency demands.
Our network of electronic special gas production plants worldwide are strategically located in key manufacturing markets. This gives you the benefit of timely deliveries and flexibility and security of supply.
Electronic special gases are shipped in a variety of container sizes to fit your individual application needs. These include cylinders, ton tanks, tube trailers, and ISO containers.
Deposition |
Etch |
| Ammonia (NH3) | Boron trichloride (BCl3) |
| Dichlorosilane (SiH2Cl2) | Carbon dioxide (CO2) |
| Disilane (Si2H6) | Carbon monoxide (CO) |
| Hexachlorodisilane (Si2Cl6) | Chlorine (Cl2) |
| Monomethylsilane (MMS) | Chlorine trifluoride (ClF3) |
| Nitric oxide (NO) | Difluoromethane - Halocarbon 32 (CH2F2) |
| Nitrous oxide (N2O) | *Fluorine (F2) |
| Oxygen (O2) |
Fluorine Nitrogen mixture (20% F2/N2 mixture) |
| Silane (SiH4) | Hexafluoro-1, 3-butadiene - Halocarbon 2316 (C4F6) |
| Trichlorosilane (SiHCl3) | Hexafluoroethane - Halocarbon 116 (C2F6) |
| Trimethylsilane (3MS) | Hydrogen bromide (HBr) |
| Tungsten hexafluoride (WF6) | Hydrogen chloride (HCl) |
| Hydrogen fluoride (aHF) | |
| Methyl fluoride - Halocarbon 41 (CH3F) | |
| Nitrogen trifluoride (NF3) | |
| Octofluorocyclobutane - Halocarbon 318 (C4F8) | |
| Octofluorocyclopentene - Halocarbon 1418 (C5F8) | |
| Octofluoropropane - Halocarbon 218 (C3F8) | |
| Silicon tetrafluoride (SiF4) | |
| Sulphur hexafluoride (SF6) | |
| Tetrafluoromethane - Halocarbon 14 (CF4) | |
| Trifluoromethane - Halocarbon 23 (CHF3) | |
| Xenon difluoride (XeF2) |
Doping |
Others |
| Arsine (AsH3) | Argon (Ar) |
| Boron-11 trifluoride (11BF3) | Helium (He) |
| Diborane (B2H6) | *Hydrogen (H2) |
| Diborane (11B2H6) | Hydrogen sulphide (H2S) |
| Germane (GeH4) | *Nitrogen (N2) |
| Phosphine (PH3) | |
| Trimethyl-Boron (TMB) | |
* Can be supplied from on-site generator |
|
Availability and specifications may vary by location. Please contact your local Linde Gas office.